JPS5645292B2 - - Google Patents

Info

Publication number
JPS5645292B2
JPS5645292B2 JP7452276A JP7452276A JPS5645292B2 JP S5645292 B2 JPS5645292 B2 JP S5645292B2 JP 7452276 A JP7452276 A JP 7452276A JP 7452276 A JP7452276 A JP 7452276A JP S5645292 B2 JPS5645292 B2 JP S5645292B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7452276A
Other languages
Japanese (ja)
Other versions
JPS53977A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7452276A priority Critical patent/JPS53977A/ja
Publication of JPS53977A publication Critical patent/JPS53977A/ja
Publication of JPS5645292B2 publication Critical patent/JPS5645292B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Electron Beam Exposure (AREA)
JP7452276A 1976-06-25 1976-06-25 Preparation of fine pattern Granted JPS53977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7452276A JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7452276A JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Publications (2)

Publication Number Publication Date
JPS53977A JPS53977A (en) 1978-01-07
JPS5645292B2 true JPS5645292B2 (US20100268047A1-20101021-C00003.png) 1981-10-26

Family

ID=13549727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7452276A Granted JPS53977A (en) 1976-06-25 1976-06-25 Preparation of fine pattern

Country Status (1)

Country Link
JP (1) JPS53977A (US20100268047A1-20101021-C00003.png)

Also Published As

Publication number Publication date
JPS53977A (en) 1978-01-07

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