JPS5644565B2 - - Google Patents
Info
- Publication number
- JPS5644565B2 JPS5644565B2 JP10944072A JP10944072A JPS5644565B2 JP S5644565 B2 JPS5644565 B2 JP S5644565B2 JP 10944072 A JP10944072 A JP 10944072A JP 10944072 A JP10944072 A JP 10944072A JP S5644565 B2 JPS5644565 B2 JP S5644565B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10944072A JPS5644565B2 (en:Method) | 1972-11-02 | 1972-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10944072A JPS5644565B2 (en:Method) | 1972-11-02 | 1972-11-02 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18392480A Division JPS56155532A (en) | 1980-12-26 | 1980-12-26 | Position fitting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4969128A JPS4969128A (en:Method) | 1974-07-04 |
| JPS5644565B2 true JPS5644565B2 (en:Method) | 1981-10-20 |
Family
ID=14510286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10944072A Expired JPS5644565B2 (en:Method) | 1972-11-02 | 1972-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5644565B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62170301U (en:Method) * | 1986-04-21 | 1987-10-29 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL121313C (en:Method) * | 1959-10-09 |
-
1972
- 1972-11-02 JP JP10944072A patent/JPS5644565B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62170301U (en:Method) * | 1986-04-21 | 1987-10-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4969128A (en:Method) | 1974-07-04 |