JPS5643724A - Method and device for semiconductorrwafer pecvvtreatment - Google Patents

Method and device for semiconductorrwafer pecvvtreatment

Info

Publication number
JPS5643724A
JPS5643724A JP11781979A JP11781979A JPS5643724A JP S5643724 A JPS5643724 A JP S5643724A JP 11781979 A JP11781979 A JP 11781979A JP 11781979 A JP11781979 A JP 11781979A JP S5643724 A JPS5643724 A JP S5643724A
Authority
JP
Japan
Prior art keywords
semiconductorrwafer
pecvvtreatment
semiconductorrwafer pecvvtreatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11781979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337495B2 (enrdf_load_stackoverflow
Inventor
Emu Enguru Jiyuniaa Jiyooji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pacific Western Systems Inc
Original Assignee
Pacific Western Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pacific Western Systems Inc filed Critical Pacific Western Systems Inc
Priority to JP11781979A priority Critical patent/JPS5643724A/ja
Publication of JPS5643724A publication Critical patent/JPS5643724A/ja
Publication of JPS6337495B2 publication Critical patent/JPS6337495B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP11781979A 1979-09-13 1979-09-13 Method and device for semiconductorrwafer pecvvtreatment Granted JPS5643724A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11781979A JPS5643724A (en) 1979-09-13 1979-09-13 Method and device for semiconductorrwafer pecvvtreatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11781979A JPS5643724A (en) 1979-09-13 1979-09-13 Method and device for semiconductorrwafer pecvvtreatment

Publications (2)

Publication Number Publication Date
JPS5643724A true JPS5643724A (en) 1981-04-22
JPS6337495B2 JPS6337495B2 (enrdf_load_stackoverflow) 1988-07-26

Family

ID=14721032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11781979A Granted JPS5643724A (en) 1979-09-13 1979-09-13 Method and device for semiconductorrwafer pecvvtreatment

Country Status (1)

Country Link
JP (1) JPS5643724A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159532A (ja) * 1982-01-06 1984-09-10 ドライテツク・インコ−ポレ−テツド ガスプラズマ処理装置
JPS6159840A (ja) * 1984-08-31 1986-03-27 Fujitsu Ltd 気相成長方法
JPS6192054U (enrdf_load_stackoverflow) * 1984-11-22 1986-06-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159532A (ja) * 1982-01-06 1984-09-10 ドライテツク・インコ−ポレ−テツド ガスプラズマ処理装置
JPS6159840A (ja) * 1984-08-31 1986-03-27 Fujitsu Ltd 気相成長方法
JPS6192054U (enrdf_load_stackoverflow) * 1984-11-22 1986-06-14

Also Published As

Publication number Publication date
JPS6337495B2 (enrdf_load_stackoverflow) 1988-07-26

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