JPS5642972U - - Google Patents
Info
- Publication number
- JPS5642972U JPS5642972U JP12583079U JP12583079U JPS5642972U JP S5642972 U JPS5642972 U JP S5642972U JP 12583079 U JP12583079 U JP 12583079U JP 12583079 U JP12583079 U JP 12583079U JP S5642972 U JPS5642972 U JP S5642972U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12583079U JPS5837953Y2 (ja) | 1979-09-12 | 1979-09-12 | スパッタ蒸着用基盤保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12583079U JPS5837953Y2 (ja) | 1979-09-12 | 1979-09-12 | スパッタ蒸着用基盤保持具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5642972U true JPS5642972U (enExample) | 1981-04-18 |
| JPS5837953Y2 JPS5837953Y2 (ja) | 1983-08-27 |
Family
ID=29357721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12583079U Expired JPS5837953Y2 (ja) | 1979-09-12 | 1979-09-12 | スパッタ蒸着用基盤保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5837953Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60172317U (ja) * | 1984-04-24 | 1985-11-15 | 株式会社トーキン | トランス |
-
1979
- 1979-09-12 JP JP12583079U patent/JPS5837953Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60172317U (ja) * | 1984-04-24 | 1985-11-15 | 株式会社トーキン | トランス |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5837953Y2 (ja) | 1983-08-27 |