JPS5642972U - - Google Patents

Info

Publication number
JPS5642972U
JPS5642972U JP12583079U JP12583079U JPS5642972U JP S5642972 U JPS5642972 U JP S5642972U JP 12583079 U JP12583079 U JP 12583079U JP 12583079 U JP12583079 U JP 12583079U JP S5642972 U JPS5642972 U JP S5642972U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12583079U
Other languages
Japanese (ja)
Other versions
JPS5837953Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12583079U priority Critical patent/JPS5837953Y2/ja
Publication of JPS5642972U publication Critical patent/JPS5642972U/ja
Application granted granted Critical
Publication of JPS5837953Y2 publication Critical patent/JPS5837953Y2/ja
Expired legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)
JP12583079U 1979-09-12 1979-09-12 スパッタ蒸着用基盤保持具 Expired JPS5837953Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12583079U JPS5837953Y2 (ja) 1979-09-12 1979-09-12 スパッタ蒸着用基盤保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12583079U JPS5837953Y2 (ja) 1979-09-12 1979-09-12 スパッタ蒸着用基盤保持具

Publications (2)

Publication Number Publication Date
JPS5642972U true JPS5642972U (enrdf_load_stackoverflow) 1981-04-18
JPS5837953Y2 JPS5837953Y2 (ja) 1983-08-27

Family

ID=29357721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12583079U Expired JPS5837953Y2 (ja) 1979-09-12 1979-09-12 スパッタ蒸着用基盤保持具

Country Status (1)

Country Link
JP (1) JPS5837953Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60172317U (ja) * 1984-04-24 1985-11-15 株式会社トーキン トランス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60172317U (ja) * 1984-04-24 1985-11-15 株式会社トーキン トランス

Also Published As

Publication number Publication date
JPS5837953Y2 (ja) 1983-08-27

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