JPS5642923A - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
JPS5642923A
JPS5642923A JP11909779A JP11909779A JPS5642923A JP S5642923 A JPS5642923 A JP S5642923A JP 11909779 A JP11909779 A JP 11909779A JP 11909779 A JP11909779 A JP 11909779A JP S5642923 A JPS5642923 A JP S5642923A
Authority
JP
Japan
Prior art keywords
vacuum valve
vacuum
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11909779A
Other languages
Japanese (ja)
Inventor
Tomoyuki Washihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11909779A priority Critical patent/JPS5642923A/en
Publication of JPS5642923A publication Critical patent/JPS5642923A/en
Pending legal-status Critical Current

Links

JP11909779A 1979-09-17 1979-09-17 Vacuum valve Pending JPS5642923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11909779A JPS5642923A (en) 1979-09-17 1979-09-17 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11909779A JPS5642923A (en) 1979-09-17 1979-09-17 Vacuum valve

Publications (1)

Publication Number Publication Date
JPS5642923A true JPS5642923A (en) 1981-04-21

Family

ID=14752821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11909779A Pending JPS5642923A (en) 1979-09-17 1979-09-17 Vacuum valve

Country Status (1)

Country Link
JP (1) JPS5642923A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170447U (en) * 1987-04-25 1988-11-07
JP2006324177A (en) * 2005-05-20 2006-11-30 Toshiba Corp Vacuum valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170447U (en) * 1987-04-25 1988-11-07
JPH033563Y2 (en) * 1987-04-25 1991-01-30
JP2006324177A (en) * 2005-05-20 2006-11-30 Toshiba Corp Vacuum valve

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