JPS5642815U - - Google Patents

Info

Publication number
JPS5642815U
JPS5642815U JP12434379U JP12434379U JPS5642815U JP S5642815 U JPS5642815 U JP S5642815U JP 12434379 U JP12434379 U JP 12434379U JP 12434379 U JP12434379 U JP 12434379U JP S5642815 U JPS5642815 U JP S5642815U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12434379U
Other languages
Japanese (ja)
Other versions
JPS6320490Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979124343U priority Critical patent/JPS6320490Y2/ja
Publication of JPS5642815U publication Critical patent/JPS5642815U/ja
Application granted granted Critical
Publication of JPS6320490Y2 publication Critical patent/JPS6320490Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Drilling And Boring (AREA)
JP1979124343U 1979-09-08 1979-09-08 Expired JPS6320490Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979124343U JPS6320490Y2 (enrdf_load_html_response) 1979-09-08 1979-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979124343U JPS6320490Y2 (enrdf_load_html_response) 1979-09-08 1979-09-08

Publications (2)

Publication Number Publication Date
JPS5642815U true JPS5642815U (enrdf_load_html_response) 1981-04-18
JPS6320490Y2 JPS6320490Y2 (enrdf_load_html_response) 1988-06-07

Family

ID=29356243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979124343U Expired JPS6320490Y2 (enrdf_load_html_response) 1979-09-08 1979-09-08

Country Status (1)

Country Link
JP (1) JPS6320490Y2 (enrdf_load_html_response)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6838114B2 (en) 2002-05-24 2005-01-04 Micron Technology, Inc. Methods for controlling gas pulsing in processes for depositing materials onto micro-device workpieces
US6955725B2 (en) 2002-08-15 2005-10-18 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US6926775B2 (en) 2003-02-11 2005-08-09 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US7422635B2 (en) 2003-08-28 2008-09-09 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
US7581511B2 (en) 2003-10-10 2009-09-01 Micron Technology, Inc. Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
US7258892B2 (en) 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
US7584942B2 (en) 2004-03-31 2009-09-08 Micron Technology, Inc. Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52784U (enrdf_load_html_response) * 1975-06-21 1977-01-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52784U (enrdf_load_html_response) * 1975-06-21 1977-01-06

Also Published As

Publication number Publication date
JPS6320490Y2 (enrdf_load_html_response) 1988-06-07

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