JPS5641955B2 - - Google Patents
Info
- Publication number
- JPS5641955B2 JPS5641955B2 JP15642975A JP15642975A JPS5641955B2 JP S5641955 B2 JPS5641955 B2 JP S5641955B2 JP 15642975 A JP15642975 A JP 15642975A JP 15642975 A JP15642975 A JP 15642975A JP S5641955 B2 JPS5641955 B2 JP S5641955B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Geophysics And Detection Of Objects (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15642975A JPS5282370A (en) | 1975-12-29 | 1975-12-29 | Manufacture of groove-shaped photo micro sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15642975A JPS5282370A (en) | 1975-12-29 | 1975-12-29 | Manufacture of groove-shaped photo micro sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5282370A JPS5282370A (en) | 1977-07-09 |
| JPS5641955B2 true JPS5641955B2 (en:Method) | 1981-10-01 |
Family
ID=15627543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15642975A Granted JPS5282370A (en) | 1975-12-29 | 1975-12-29 | Manufacture of groove-shaped photo micro sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5282370A (en:Method) |
-
1975
- 1975-12-29 JP JP15642975A patent/JPS5282370A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5282370A (en) | 1977-07-09 |