JPS5641700B2 - - Google Patents

Info

Publication number
JPS5641700B2
JPS5641700B2 JP10525576A JP10525576A JPS5641700B2 JP S5641700 B2 JPS5641700 B2 JP S5641700B2 JP 10525576 A JP10525576 A JP 10525576A JP 10525576 A JP10525576 A JP 10525576A JP S5641700 B2 JPS5641700 B2 JP S5641700B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10525576A
Other languages
Japanese (ja)
Other versions
JPS5330435A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10525576A priority Critical patent/JPS5330435A/ja
Publication of JPS5330435A publication Critical patent/JPS5330435A/ja
Publication of JPS5641700B2 publication Critical patent/JPS5641700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/28—Acidic compositions for etching iron group metals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP10525576A 1976-09-02 1976-09-02 Etching liquid Granted JPS5330435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10525576A JPS5330435A (en) 1976-09-02 1976-09-02 Etching liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10525576A JPS5330435A (en) 1976-09-02 1976-09-02 Etching liquid

Publications (2)

Publication Number Publication Date
JPS5330435A JPS5330435A (en) 1978-03-22
JPS5641700B2 true JPS5641700B2 (bg) 1981-09-30

Family

ID=14402533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10525576A Granted JPS5330435A (en) 1976-09-02 1976-09-02 Etching liquid

Country Status (1)

Country Link
JP (1) JPS5330435A (bg)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2923524B2 (ja) * 1995-08-01 1999-07-26 メック株式会社 銅および銅合金のマイクロエッチング剤並びにマイクロエッチング方法
US6746547B2 (en) * 2002-03-05 2004-06-08 Rd Chemical Company Methods and compositions for oxide production on copper
ES2348361T3 (es) 2005-10-25 2010-12-03 Atotech Deutschland Gmbh Método para adhesión mejorada de materiales polímeros a superficies de cobre o aleaciones de cobre.
US20110049104A1 (en) 2008-01-15 2011-03-03 Makoto Kato Etchant for copper or copper alloy, liquid for etching pretreatment, and etching method
EP2241653B1 (en) * 2009-04-15 2017-09-06 ATOTECH Deutschland GmbH Composition and method for micro etching of copper and copper alloys

Also Published As

Publication number Publication date
JPS5330435A (en) 1978-03-22

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