JPS5641394U - - Google Patents
Info
- Publication number
- JPS5641394U JPS5641394U JP12244279U JP12244279U JPS5641394U JP S5641394 U JPS5641394 U JP S5641394U JP 12244279 U JP12244279 U JP 12244279U JP 12244279 U JP12244279 U JP 12244279U JP S5641394 U JPS5641394 U JP S5641394U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Alarm Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12244279U JPS5641394U (cs) | 1979-09-06 | 1979-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12244279U JPS5641394U (cs) | 1979-09-06 | 1979-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5641394U true JPS5641394U (cs) | 1981-04-16 |
Family
ID=29354509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12244279U Pending JPS5641394U (cs) | 1979-09-06 | 1979-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5641394U (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4996183A (cs) * | 1973-01-25 | 1974-09-11 | ||
| JPS5422759A (en) * | 1977-07-22 | 1979-02-20 | Hitachi Ltd | Handling method for semiconductor wafer |
-
1979
- 1979-09-06 JP JP12244279U patent/JPS5641394U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4996183A (cs) * | 1973-01-25 | 1974-09-11 | ||
| JPS5422759A (en) * | 1977-07-22 | 1979-02-20 | Hitachi Ltd | Handling method for semiconductor wafer |