JPS5641166B2 - - Google Patents
Info
- Publication number
- JPS5641166B2 JPS5641166B2 JP6737876A JP6737876A JPS5641166B2 JP S5641166 B2 JPS5641166 B2 JP S5641166B2 JP 6737876 A JP6737876 A JP 6737876A JP 6737876 A JP6737876 A JP 6737876A JP S5641166 B2 JPS5641166 B2 JP S5641166B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6737876A JPS52149967A (en) | 1976-06-08 | 1976-06-08 | Peeling method of wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6737876A JPS52149967A (en) | 1976-06-08 | 1976-06-08 | Peeling method of wafers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52149967A JPS52149967A (en) | 1977-12-13 |
| JPS5641166B2 true JPS5641166B2 (en) | 1981-09-26 |
Family
ID=13343281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6737876A Granted JPS52149967A (en) | 1976-06-08 | 1976-06-08 | Peeling method of wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52149967A (en) |
-
1976
- 1976-06-08 JP JP6737876A patent/JPS52149967A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52149967A (en) | 1977-12-13 |