JPS564078Y2 - - Google Patents
Info
- Publication number
- JPS564078Y2 JPS564078Y2 JP1978101085U JP10108578U JPS564078Y2 JP S564078 Y2 JPS564078 Y2 JP S564078Y2 JP 1978101085 U JP1978101085 U JP 1978101085U JP 10108578 U JP10108578 U JP 10108578U JP S564078 Y2 JPS564078 Y2 JP S564078Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978101085U JPS564078Y2 (en) | 1978-07-21 | 1978-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978101085U JPS564078Y2 (en) | 1978-07-21 | 1978-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5519621U JPS5519621U (en) | 1980-02-07 |
| JPS564078Y2 true JPS564078Y2 (en) | 1981-01-29 |
Family
ID=29039395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978101085U Expired JPS564078Y2 (en) | 1978-07-21 | 1978-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS564078Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52126183A (en) * | 1976-04-15 | 1977-10-22 | Hitachi Ltd | Preparation of semiconductor device |
-
1978
- 1978-07-21 JP JP1978101085U patent/JPS564078Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52126183A (en) * | 1976-04-15 | 1977-10-22 | Hitachi Ltd | Preparation of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5519621U (en) | 1980-02-07 |