JPS5640661U - - Google Patents
Info
- Publication number
- JPS5640661U JPS5640661U JP12384779U JP12384779U JPS5640661U JP S5640661 U JPS5640661 U JP S5640661U JP 12384779 U JP12384779 U JP 12384779U JP 12384779 U JP12384779 U JP 12384779U JP S5640661 U JPS5640661 U JP S5640661U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12384779U JPS5640661U (enExample) | 1979-09-07 | 1979-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12384779U JPS5640661U (enExample) | 1979-09-07 | 1979-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5640661U true JPS5640661U (enExample) | 1981-04-15 |
Family
ID=29355769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12384779U Pending JPS5640661U (enExample) | 1979-09-07 | 1979-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5640661U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5963775A (ja) * | 1982-07-30 | 1984-04-11 | エナージー・コンバーション・デバイセス・インコーポレーテッド | 電極組立体及びこれを備えた光起電力デバイスの製造装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5450440A (en) * | 1977-09-29 | 1979-04-20 | Cho Lsi Gijutsu Kenkyu Kumiai | Plasma etching device |
-
1979
- 1979-09-07 JP JP12384779U patent/JPS5640661U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5450440A (en) * | 1977-09-29 | 1979-04-20 | Cho Lsi Gijutsu Kenkyu Kumiai | Plasma etching device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5963775A (ja) * | 1982-07-30 | 1984-04-11 | エナージー・コンバーション・デバイセス・インコーポレーテッド | 電極組立体及びこれを備えた光起電力デバイスの製造装置 |