JPS5640659U - - Google Patents
Info
- Publication number
- JPS5640659U JPS5640659U JP12375879U JP12375879U JPS5640659U JP S5640659 U JPS5640659 U JP S5640659U JP 12375879 U JP12375879 U JP 12375879U JP 12375879 U JP12375879 U JP 12375879U JP S5640659 U JPS5640659 U JP S5640659U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12375879U JPS6112675Y2 (https=) | 1979-09-07 | 1979-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12375879U JPS6112675Y2 (https=) | 1979-09-07 | 1979-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5640659U true JPS5640659U (https=) | 1981-04-15 |
| JPS6112675Y2 JPS6112675Y2 (https=) | 1986-04-19 |
Family
ID=29355686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12375879U Expired JPS6112675Y2 (https=) | 1979-09-07 | 1979-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6112675Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010232035A (ja) * | 2009-03-27 | 2010-10-14 | Fujifilm Corp | 電子ビーム描画方法、電子ビーム描画装置、モールドの製造方法および磁気ディスク媒体の製造方法 |
-
1979
- 1979-09-07 JP JP12375879U patent/JPS6112675Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010232035A (ja) * | 2009-03-27 | 2010-10-14 | Fujifilm Corp | 電子ビーム描画方法、電子ビーム描画装置、モールドの製造方法および磁気ディスク媒体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6112675Y2 (https=) | 1986-04-19 |