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Priority to JP4265875ApriorityCriticalpatent/JPS51116999A/ja
Publication of JPS51116999ApublicationCriticalpatent/JPS51116999A/ja
Publication of JPS5640449B2publicationCriticalpatent/JPS5640449B2/ja
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C14/0021—Reactive sputtering or evaporation
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Chemical & Material Sciences
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Chemical Kinetics & Catalysis
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Engineering & Computer Science
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Materials Engineering
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Mechanical Engineering
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Metallurgy
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Organic Chemistry
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Physical Vapour Deposition
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Devices For Indicating Variable Information By Combining Individual Elements
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Apparatuses And Processes For Manufacturing Resistors
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Manufacturing Of Electric Cables
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JP4265875A1975-04-081975-04-08Process for manufacturing transparent conductive plastic
GrantedJPS51116999A
(en)