JPS5639680B2 - - Google Patents
Info
- Publication number
- JPS5639680B2 JPS5639680B2 JP3748774A JP3748774A JPS5639680B2 JP S5639680 B2 JPS5639680 B2 JP S5639680B2 JP 3748774 A JP3748774 A JP 3748774A JP 3748774 A JP3748774 A JP 3748774A JP S5639680 B2 JPS5639680 B2 JP S5639680B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3748774A JPS5639680B2 (ja) | 1974-04-02 | 1974-04-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3748774A JPS5639680B2 (ja) | 1974-04-02 | 1974-04-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50129701A JPS50129701A (ja) | 1975-10-14 |
JPS5639680B2 true JPS5639680B2 (ja) | 1981-09-14 |
Family
ID=12498866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3748774A Expired JPS5639680B2 (ja) | 1974-04-02 | 1974-04-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5639680B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429163Y2 (ja) * | 1987-12-16 | 1992-07-15 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1500541A (en) * | 1975-03-20 | 1978-02-08 | Mullard Ltd | Method of producing positive-working electron resist coatings |
-
1974
- 1974-04-02 JP JP3748774A patent/JPS5639680B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429163Y2 (ja) * | 1987-12-16 | 1992-07-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS50129701A (ja) | 1975-10-14 |