JPS5639462B2 - - Google Patents

Info

Publication number
JPS5639462B2
JPS5639462B2 JP5457576A JP5457576A JPS5639462B2 JP S5639462 B2 JPS5639462 B2 JP S5639462B2 JP 5457576 A JP5457576 A JP 5457576A JP 5457576 A JP5457576 A JP 5457576A JP S5639462 B2 JPS5639462 B2 JP S5639462B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5457576A
Other languages
Japanese (ja)
Other versions
JPS52122123A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5457576A priority Critical patent/JPS52122123A/ja
Publication of JPS52122123A publication Critical patent/JPS52122123A/ja
Publication of JPS5639462B2 publication Critical patent/JPS5639462B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5457576A 1976-05-12 1976-05-12 Method and device for coating resist film Granted JPS52122123A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5457576A JPS52122123A (en) 1976-05-12 1976-05-12 Method and device for coating resist film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5457576A JPS52122123A (en) 1976-05-12 1976-05-12 Method and device for coating resist film

Publications (2)

Publication Number Publication Date
JPS52122123A JPS52122123A (en) 1977-10-14
JPS5639462B2 true JPS5639462B2 (cs) 1981-09-12

Family

ID=12974484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5457576A Granted JPS52122123A (en) 1976-05-12 1976-05-12 Method and device for coating resist film

Country Status (1)

Country Link
JP (1) JPS52122123A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0669545B2 (ja) * 1987-11-23 1994-09-07 タツモ株式会社 塗布装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333437B2 (cs) * 1974-04-17 1978-09-13

Also Published As

Publication number Publication date
JPS52122123A (en) 1977-10-14

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