JPS5639407A - Detector for register mark - Google Patents
Detector for register markInfo
- Publication number
- JPS5639407A JPS5639407A JP11416279A JP11416279A JPS5639407A JP S5639407 A JPS5639407 A JP S5639407A JP 11416279 A JP11416279 A JP 11416279A JP 11416279 A JP11416279 A JP 11416279A JP S5639407 A JPS5639407 A JP S5639407A
- Authority
- JP
- Japan
- Prior art keywords
- image
- photographing
- right angle
- primary
- marks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Liquid Crystal (AREA)
Abstract
PURPOSE: To make the mark detection extremly stable by photographing an image of the vertical and horizontal lines of the mark with different TV cameras and making the horizontal direction of each picture match with a direction to be detected.
CONSTITUTION: The primary photographing means, TV 6A, 6C, which photograph from each other's right angle marks P1, P2 and P3, P4 for register formed o flat plates 1, 2 and TV 6B, 6D, the secondary image-photographing means, are provided. Image-photographing signals obtained by the primary and secondary image- photographing means at a right angle with each other, are independently taken out. Then the image-photographing signals are integrated in such manner that the image-photographing signals at a right angle with each other may be projected in a uniaxial direction. After this process, the positions of marks P1, P2 and P3, P4 are detected based on each integrated signal obtained.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11416279A JPS594642B2 (en) | 1979-09-07 | 1979-09-07 | Alignment mark detection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11416279A JPS594642B2 (en) | 1979-09-07 | 1979-09-07 | Alignment mark detection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5639407A true JPS5639407A (en) | 1981-04-15 |
JPS594642B2 JPS594642B2 (en) | 1984-01-31 |
Family
ID=14630707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11416279A Expired JPS594642B2 (en) | 1979-09-07 | 1979-09-07 | Alignment mark detection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS594642B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863916A (en) * | 1981-10-13 | 1983-04-16 | Citizen Watch Co Ltd | Correcting method for glass position in assembly of liquid crystal cell glass |
JPS60163110A (en) * | 1984-02-06 | 1985-08-26 | Canon Inc | Positioning device |
-
1979
- 1979-09-07 JP JP11416279A patent/JPS594642B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5863916A (en) * | 1981-10-13 | 1983-04-16 | Citizen Watch Co Ltd | Correcting method for glass position in assembly of liquid crystal cell glass |
JPH0324651B2 (en) * | 1981-10-13 | 1991-04-03 | Citizen Watch Co Ltd | |
JPS60163110A (en) * | 1984-02-06 | 1985-08-26 | Canon Inc | Positioning device |
Also Published As
Publication number | Publication date |
---|---|
JPS594642B2 (en) | 1984-01-31 |
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