JPS5639052B2 - - Google Patents

Info

Publication number
JPS5639052B2
JPS5639052B2 JP73497A JP49773A JPS5639052B2 JP S5639052 B2 JPS5639052 B2 JP S5639052B2 JP 73497 A JP73497 A JP 73497A JP 49773 A JP49773 A JP 49773A JP S5639052 B2 JPS5639052 B2 JP S5639052B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP73497A
Other languages
Japanese (ja)
Other versions
JPS4991189A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP73497A priority Critical patent/JPS5639052B2/ja
Publication of JPS4991189A publication Critical patent/JPS4991189A/ja
Publication of JPS5639052B2 publication Critical patent/JPS5639052B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP73497A 1972-12-29 1972-12-29 Expired JPS5639052B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (fr) 1972-12-29 1972-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73497A JPS5639052B2 (fr) 1972-12-29 1972-12-29

Publications (2)

Publication Number Publication Date
JPS4991189A JPS4991189A (fr) 1974-08-30
JPS5639052B2 true JPS5639052B2 (fr) 1981-09-10

Family

ID=11475379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73497A Expired JPS5639052B2 (fr) 1972-12-29 1972-12-29

Country Status (1)

Country Link
JP (1) JPS5639052B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5772333A (en) * 1980-10-23 1982-05-06 Fujitsu Ltd Manufacture of semiconductor device
JPS58212137A (ja) * 1982-06-03 1983-12-09 Mitsubishi Electric Corp 半導体素子の製造方法
DE68925774T2 (de) * 1988-10-02 1996-08-08 Canon Kk Feinbearbeitungsmethode für kristallines Material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (fr) * 1971-09-15 1973-06-01
JPS4855586A (fr) * 1971-11-13 1973-08-04
JPS4915114A (fr) * 1972-06-02 1974-02-09

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (fr) * 1971-09-15 1973-06-01
JPS4855586A (fr) * 1971-11-13 1973-08-04
JPS4915114A (fr) * 1972-06-02 1974-02-09

Also Published As

Publication number Publication date
JPS4991189A (fr) 1974-08-30

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