JPS5638995B2 - - Google Patents
Info
- Publication number
- JPS5638995B2 JPS5638995B2 JP2646576A JP2646576A JPS5638995B2 JP S5638995 B2 JPS5638995 B2 JP S5638995B2 JP 2646576 A JP2646576 A JP 2646576A JP 2646576 A JP2646576 A JP 2646576A JP S5638995 B2 JPS5638995 B2 JP S5638995B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Conveyance By Endless Belt Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2646576A JPS52108883A (en) | 1976-03-10 | 1976-03-10 | Sheet delivery setting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2646576A JPS52108883A (en) | 1976-03-10 | 1976-03-10 | Sheet delivery setting apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52108883A JPS52108883A (en) | 1977-09-12 |
| JPS5638995B2 true JPS5638995B2 (ja) | 1981-09-10 |
Family
ID=12194257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2646576A Granted JPS52108883A (en) | 1976-03-10 | 1976-03-10 | Sheet delivery setting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52108883A (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62173195U (ja) * | 1986-04-23 | 1987-11-04 | ||
| KR20170108834A (ko) | 2016-03-18 | 2017-09-27 | 스미도모쥬기가이 이온 테크놀로지 가부시키가이샤 | 이온주입장치 및 스캔파형 작성방법 |
| US11145488B2 (en) | 2019-08-07 | 2021-10-12 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter and ion implantation method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233276Y2 (ja) * | 1972-10-02 | 1977-07-29 | ||
| JPS5629307Y2 (ja) * | 1975-07-04 | 1981-07-13 |
-
1976
- 1976-03-10 JP JP2646576A patent/JPS52108883A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62173195U (ja) * | 1986-04-23 | 1987-11-04 | ||
| KR20170108834A (ko) | 2016-03-18 | 2017-09-27 | 스미도모쥬기가이 이온 테크놀로지 가부시키가이샤 | 이온주입장치 및 스캔파형 작성방법 |
| US11145488B2 (en) | 2019-08-07 | 2021-10-12 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter and ion implantation method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52108883A (en) | 1977-09-12 |