JPS5638961B2 - - Google Patents
Info
- Publication number
- JPS5638961B2 JPS5638961B2 JP6606472A JP6606472A JPS5638961B2 JP S5638961 B2 JPS5638961 B2 JP S5638961B2 JP 6606472 A JP6606472 A JP 6606472A JP 6606472 A JP6606472 A JP 6606472A JP S5638961 B2 JPS5638961 B2 JP S5638961B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Feedback Control In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6606472A JPS5638961B2 (en:Method) | 1972-06-30 | 1972-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6606472A JPS5638961B2 (en:Method) | 1972-06-30 | 1972-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4925384A JPS4925384A (en:Method) | 1974-03-06 |
| JPS5638961B2 true JPS5638961B2 (en:Method) | 1981-09-10 |
Family
ID=13305037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6606472A Expired JPS5638961B2 (en:Method) | 1972-06-30 | 1972-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5638961B2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184819A (ja) * | 1983-04-06 | 1984-10-20 | Hitachi Ltd | 半導体圧力センサ |
-
1972
- 1972-06-30 JP JP6606472A patent/JPS5638961B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4925384A (en:Method) | 1974-03-06 |