JPS5638059B2 - - Google Patents
Info
- Publication number
- JPS5638059B2 JPS5638059B2 JP11544076A JP11544076A JPS5638059B2 JP S5638059 B2 JPS5638059 B2 JP S5638059B2 JP 11544076 A JP11544076 A JP 11544076A JP 11544076 A JP11544076 A JP 11544076A JP S5638059 B2 JPS5638059 B2 JP S5638059B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11544076A JPS5341179A (en) | 1976-09-28 | 1976-09-28 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11544076A JPS5341179A (en) | 1976-09-28 | 1976-09-28 | Semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5341179A JPS5341179A (en) | 1978-04-14 |
| JPS5638059B2 true JPS5638059B2 (pm) | 1981-09-03 |
Family
ID=14662602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11544076A Granted JPS5341179A (en) | 1976-09-28 | 1976-09-28 | Semiconductor device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5341179A (pm) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3899363A (en) * | 1974-06-28 | 1975-08-12 | Ibm | Method and device for reducing sidewall conduction in recessed oxide pet arrays |
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1976
- 1976-09-28 JP JP11544076A patent/JPS5341179A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5341179A (en) | 1978-04-14 |