JPS5637692A - Method of manufacturing hybrid thin film integrated circuit board - Google Patents
Method of manufacturing hybrid thin film integrated circuit boardInfo
- Publication number
- JPS5637692A JPS5637692A JP11333979A JP11333979A JPS5637692A JP S5637692 A JPS5637692 A JP S5637692A JP 11333979 A JP11333979 A JP 11333979A JP 11333979 A JP11333979 A JP 11333979A JP S5637692 A JPS5637692 A JP S5637692A
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- thin film
- integrated circuit
- film integrated
- hybrid thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11333979A JPS5637692A (en) | 1979-09-04 | 1979-09-04 | Method of manufacturing hybrid thin film integrated circuit board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11333979A JPS5637692A (en) | 1979-09-04 | 1979-09-04 | Method of manufacturing hybrid thin film integrated circuit board |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5637692A true JPS5637692A (en) | 1981-04-11 |
JPH0114718B2 JPH0114718B2 (en) | 1989-03-14 |
Family
ID=14609731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11333979A Granted JPS5637692A (en) | 1979-09-04 | 1979-09-04 | Method of manufacturing hybrid thin film integrated circuit board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5637692A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01125966A (en) * | 1987-11-11 | 1989-05-18 | Fujitsu Ltd | Manufacture of thin film circuit substrate |
WO1993024925A1 (en) * | 1992-05-26 | 1993-12-09 | Nihon Cememt Co., Ltd. | Ceramic substrate and its manufacture, and substrate vacuum-clamping device using ceramic vacuum-clamping board |
EP1170797A3 (en) * | 2000-07-04 | 2005-05-25 | Alps Electric Co., Ltd. | Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed |
-
1979
- 1979-09-04 JP JP11333979A patent/JPS5637692A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01125966A (en) * | 1987-11-11 | 1989-05-18 | Fujitsu Ltd | Manufacture of thin film circuit substrate |
WO1993024925A1 (en) * | 1992-05-26 | 1993-12-09 | Nihon Cememt Co., Ltd. | Ceramic substrate and its manufacture, and substrate vacuum-clamping device using ceramic vacuum-clamping board |
EP1170797A3 (en) * | 2000-07-04 | 2005-05-25 | Alps Electric Co., Ltd. | Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed |
Also Published As
Publication number | Publication date |
---|---|
JPH0114718B2 (en) | 1989-03-14 |
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