JPS5637478Y2 - - Google Patents
Info
- Publication number
- JPS5637478Y2 JPS5637478Y2 JP12495978U JP12495978U JPS5637478Y2 JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2 JP 12495978 U JP12495978 U JP 12495978U JP 12495978 U JP12495978 U JP 12495978U JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12495978U JPS5637478Y2 (en) | 1978-09-11 | 1978-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12495978U JPS5637478Y2 (en) | 1978-09-11 | 1978-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5540756U JPS5540756U (en) | 1980-03-15 |
| JPS5637478Y2 true JPS5637478Y2 (en) | 1981-09-02 |
Family
ID=29085432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12495978U Expired JPS5637478Y2 (en) | 1978-09-11 | 1978-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5637478Y2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57178328A (en) * | 1981-04-27 | 1982-11-02 | Hitachi Ltd | Wafer dryer |
| JPS59105865A (en) * | 1982-12-07 | 1984-06-19 | Fujitsu Ltd | Apparatus for spraying treatment |
| JPS60110114A (en) * | 1983-11-21 | 1985-06-15 | Kokusai Electric Co Ltd | Apparatus for heat treating semiconductor substrate with infrared rays |
| US4574093A (en) * | 1983-12-30 | 1986-03-04 | At&T Bell Laboratories | Deposition technique |
-
1978
- 1978-09-11 JP JP12495978U patent/JPS5637478Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5540756U (en) | 1980-03-15 |