JPS5637478Y2 - - Google Patents

Info

Publication number
JPS5637478Y2
JPS5637478Y2 JP12495978U JP12495978U JPS5637478Y2 JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2 JP 12495978 U JP12495978 U JP 12495978U JP 12495978 U JP12495978 U JP 12495978U JP S5637478 Y2 JPS5637478 Y2 JP S5637478Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12495978U
Other languages
Japanese (ja)
Other versions
JPS5540756U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12495978U priority Critical patent/JPS5637478Y2/ja
Publication of JPS5540756U publication Critical patent/JPS5540756U/ja
Application granted granted Critical
Publication of JPS5637478Y2 publication Critical patent/JPS5637478Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mattresses And Other Support Structures For Chairs And Beds (AREA)
  • Carpets (AREA)
JP12495978U 1978-09-11 1978-09-11 Expired JPS5637478Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12495978U JPS5637478Y2 (en) 1978-09-11 1978-09-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12495978U JPS5637478Y2 (en) 1978-09-11 1978-09-11

Publications (2)

Publication Number Publication Date
JPS5540756U JPS5540756U (en) 1980-03-15
JPS5637478Y2 true JPS5637478Y2 (en) 1981-09-02

Family

ID=29085432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12495978U Expired JPS5637478Y2 (en) 1978-09-11 1978-09-11

Country Status (1)

Country Link
JP (1) JPS5637478Y2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178328A (en) * 1981-04-27 1982-11-02 Hitachi Ltd Wafer dryer
JPS59105865A (en) * 1982-12-07 1984-06-19 Fujitsu Ltd Apparatus for spraying treatment
JPS60110114A (en) * 1983-11-21 1985-06-15 Kokusai Electric Co Ltd Apparatus for heat treating semiconductor substrate with infrared rays
US4574093A (en) * 1983-12-30 1986-03-04 At&T Bell Laboratories Deposition technique

Also Published As

Publication number Publication date
JPS5540756U (en) 1980-03-15

Similar Documents

Publication Publication Date Title
FR2414317B1 (en)
AU3898778A (en)
FR2413670B1 (en)
AU73950S (en)
BE871570A (en)
BG25806A1 (en)
BG25814A2 (en)
BG25816A1 (en)
BG25818A1 (en)
BG25835A1 (en)
BG25836A1 (en)
BG25842A1 (en)
BG25843A1 (en)
BG25849A1 (en)
BG25854A1 (en)
BG25857A1 (en)
BG25858A1 (en)
BG25871A1 (en)
BG25872A1 (en)
BG25874A1 (en)
BG25875A1 (en)
BG25879A1 (en)
BG25889A1 (en)
BG25897A1 (en)
BG25898A1 (en)