JPS5637309B2 - - Google Patents
Info
- Publication number
- JPS5637309B2 JPS5637309B2 JP9820379A JP9820379A JPS5637309B2 JP S5637309 B2 JPS5637309 B2 JP S5637309B2 JP 9820379 A JP9820379 A JP 9820379A JP 9820379 A JP9820379 A JP 9820379A JP S5637309 B2 JPS5637309 B2 JP S5637309B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37207—Verify, probe, workpiece
Landscapes
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9820379A JPS5623278A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
| EP80302564A EP0023429B1 (en) | 1979-07-31 | 1980-07-28 | Dry etching of metal film |
| DE8080302564T DE3071299D1 (en) | 1979-07-31 | 1980-07-28 | Dry etching of metal film |
| CA000357204A CA1136525A (en) | 1979-07-31 | 1980-07-29 | Dry etching of metal film |
| IE1592/80A IE50996B1 (en) | 1979-07-31 | 1980-07-30 | Dry etching of metal film |
| US06/174,140 US4350563A (en) | 1979-07-31 | 1980-07-31 | Dry etching of metal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9820379A JPS5623278A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5623278A JPS5623278A (en) | 1981-03-05 |
| JPS5637309B2 true JPS5637309B2 (enExample) | 1981-08-29 |
Family
ID=14213433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9820379A Granted JPS5623278A (en) | 1979-07-31 | 1979-07-31 | Dry etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5623278A (enExample) |
-
1979
- 1979-07-31 JP JP9820379A patent/JPS5623278A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5623278A (en) | 1981-03-05 |