JPS5636930Y2 - - Google Patents
Info
- Publication number
- JPS5636930Y2 JPS5636930Y2 JP17484976U JP17484976U JPS5636930Y2 JP S5636930 Y2 JPS5636930 Y2 JP S5636930Y2 JP 17484976 U JP17484976 U JP 17484976U JP 17484976 U JP17484976 U JP 17484976U JP S5636930 Y2 JPS5636930 Y2 JP S5636930Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17484976U JPS5636930Y2 (en:Method) | 1976-12-24 | 1976-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17484976U JPS5636930Y2 (en:Method) | 1976-12-24 | 1976-12-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5390019U JPS5390019U (en:Method) | 1978-07-24 |
| JPS5636930Y2 true JPS5636930Y2 (en:Method) | 1981-08-31 |
Family
ID=28782303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17484976U Expired JPS5636930Y2 (en:Method) | 1976-12-24 | 1976-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636930Y2 (en:Method) |
-
1976
- 1976-12-24 JP JP17484976U patent/JPS5636930Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5390019U (en:Method) | 1978-07-24 |