JPS5636705B2 - - Google Patents
Info
- Publication number
- JPS5636705B2 JPS5636705B2 JP1052676A JP1052676A JPS5636705B2 JP S5636705 B2 JPS5636705 B2 JP S5636705B2 JP 1052676 A JP1052676 A JP 1052676A JP 1052676 A JP1052676 A JP 1052676A JP S5636705 B2 JPS5636705 B2 JP S5636705B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1052676A JPS5293639A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1052676A JPS5293639A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5293639A JPS5293639A (en) | 1977-08-06 |
| JPS5636705B2 true JPS5636705B2 (en) | 1981-08-26 |
Family
ID=11752684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1052676A Granted JPS5293639A (en) | 1976-02-03 | 1976-02-03 | Plasm etching method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5293639A (en) |
-
1976
- 1976-02-03 JP JP1052676A patent/JPS5293639A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5293639A (en) | 1977-08-06 |