JPS5636570B2 - - Google Patents

Info

Publication number
JPS5636570B2
JPS5636570B2 JP3169672A JP3169672A JPS5636570B2 JP S5636570 B2 JPS5636570 B2 JP S5636570B2 JP 3169672 A JP3169672 A JP 3169672A JP 3169672 A JP3169672 A JP 3169672A JP S5636570 B2 JPS5636570 B2 JP S5636570B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3169672A
Other languages
Japanese (ja)
Other versions
JPS48101084A (sv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3169672A priority Critical patent/JPS5636570B2/ja
Publication of JPS48101084A publication Critical patent/JPS48101084A/ja
Publication of JPS5636570B2 publication Critical patent/JPS5636570B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP3169672A 1972-03-31 1972-03-31 Expired JPS5636570B2 (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (sv) 1972-03-31 1972-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (sv) 1972-03-31 1972-03-31

Publications (2)

Publication Number Publication Date
JPS48101084A JPS48101084A (sv) 1973-12-20
JPS5636570B2 true JPS5636570B2 (sv) 1981-08-25

Family

ID=12338226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3169672A Expired JPS5636570B2 (sv) 1972-03-31 1972-03-31

Country Status (1)

Country Link
JP (1) JPS5636570B2 (sv)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386580A (en) * 1977-01-10 1978-07-31 Hitachi Ltd Treating method of semiconductor complex

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042593A (en) * 1957-09-23 1962-07-03 Philco Corp Electrochemical method for cleansing semiconductive devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042593A (en) * 1957-09-23 1962-07-03 Philco Corp Electrochemical method for cleansing semiconductive devices

Also Published As

Publication number Publication date
JPS48101084A (sv) 1973-12-20

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