JPS5636570B2 - - Google Patents
Info
- Publication number
- JPS5636570B2 JPS5636570B2 JP3169672A JP3169672A JPS5636570B2 JP S5636570 B2 JPS5636570 B2 JP S5636570B2 JP 3169672 A JP3169672 A JP 3169672A JP 3169672 A JP3169672 A JP 3169672A JP S5636570 B2 JPS5636570 B2 JP S5636570B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3169672A JPS5636570B2 (es) | 1972-03-31 | 1972-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3169672A JPS5636570B2 (es) | 1972-03-31 | 1972-03-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS48101084A JPS48101084A (es) | 1973-12-20 |
JPS5636570B2 true JPS5636570B2 (es) | 1981-08-25 |
Family
ID=12338226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3169672A Expired JPS5636570B2 (es) | 1972-03-31 | 1972-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5636570B2 (es) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5386580A (en) * | 1977-01-10 | 1978-07-31 | Hitachi Ltd | Treating method of semiconductor complex |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3042593A (en) * | 1957-09-23 | 1962-07-03 | Philco Corp | Electrochemical method for cleansing semiconductive devices |
-
1972
- 1972-03-31 JP JP3169672A patent/JPS5636570B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3042593A (en) * | 1957-09-23 | 1962-07-03 | Philco Corp | Electrochemical method for cleansing semiconductive devices |
Also Published As
Publication number | Publication date |
---|---|
JPS48101084A (es) | 1973-12-20 |