JPS5636570B2 - - Google Patents

Info

Publication number
JPS5636570B2
JPS5636570B2 JP3169672A JP3169672A JPS5636570B2 JP S5636570 B2 JPS5636570 B2 JP S5636570B2 JP 3169672 A JP3169672 A JP 3169672A JP 3169672 A JP3169672 A JP 3169672A JP S5636570 B2 JPS5636570 B2 JP S5636570B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3169672A
Other languages
Japanese (ja)
Other versions
JPS48101084A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3169672A priority Critical patent/JPS5636570B2/ja
Publication of JPS48101084A publication Critical patent/JPS48101084A/ja
Publication of JPS5636570B2 publication Critical patent/JPS5636570B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP3169672A 1972-03-31 1972-03-31 Expired JPS5636570B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (cg-RX-API-DMAC7.html) 1972-03-31 1972-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3169672A JPS5636570B2 (cg-RX-API-DMAC7.html) 1972-03-31 1972-03-31

Publications (2)

Publication Number Publication Date
JPS48101084A JPS48101084A (cg-RX-API-DMAC7.html) 1973-12-20
JPS5636570B2 true JPS5636570B2 (cg-RX-API-DMAC7.html) 1981-08-25

Family

ID=12338226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3169672A Expired JPS5636570B2 (cg-RX-API-DMAC7.html) 1972-03-31 1972-03-31

Country Status (1)

Country Link
JP (1) JPS5636570B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5386580A (en) * 1977-01-10 1978-07-31 Hitachi Ltd Treating method of semiconductor complex

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3042593A (en) * 1957-09-23 1962-07-03 Philco Corp Electrochemical method for cleansing semiconductive devices

Also Published As

Publication number Publication date
JPS48101084A (cg-RX-API-DMAC7.html) 1973-12-20

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