JPS5636569B2 - - Google Patents
Info
- Publication number
- JPS5636569B2 JPS5636569B2 JP15781675A JP15781675A JPS5636569B2 JP S5636569 B2 JPS5636569 B2 JP S5636569B2 JP 15781675 A JP15781675 A JP 15781675A JP 15781675 A JP15781675 A JP 15781675A JP S5636569 B2 JPS5636569 B2 JP S5636569B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15781675A JPS5282185A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15781675A JPS5282185A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5282185A JPS5282185A (en) | 1977-07-09 |
| JPS5636569B2 true JPS5636569B2 (ref) | 1981-08-25 |
Family
ID=15657914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15781675A Granted JPS5282185A (en) | 1975-12-29 | 1975-12-29 | Vapor phase etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5282185A (ref) |
-
1975
- 1975-12-29 JP JP15781675A patent/JPS5282185A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5282185A (en) | 1977-07-09 |