JPS5636219B2 - - Google Patents

Info

Publication number
JPS5636219B2
JPS5636219B2 JP2319774A JP2319774A JPS5636219B2 JP S5636219 B2 JPS5636219 B2 JP S5636219B2 JP 2319774 A JP2319774 A JP 2319774A JP 2319774 A JP2319774 A JP 2319774A JP S5636219 B2 JPS5636219 B2 JP S5636219B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2319774A
Other languages
Japanese (ja)
Other versions
JPS50116336A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2319774A priority Critical patent/JPS5636219B2/ja
Publication of JPS50116336A publication Critical patent/JPS50116336A/ja
Publication of JPS5636219B2 publication Critical patent/JPS5636219B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2319774A 1974-02-26 1974-02-26 Expired JPS5636219B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2319774A JPS5636219B2 (en:Method) 1974-02-26 1974-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2319774A JPS5636219B2 (en:Method) 1974-02-26 1974-02-26

Publications (2)

Publication Number Publication Date
JPS50116336A JPS50116336A (en:Method) 1975-09-11
JPS5636219B2 true JPS5636219B2 (en:Method) 1981-08-22

Family

ID=12103931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2319774A Expired JPS5636219B2 (en:Method) 1974-02-26 1974-02-26

Country Status (1)

Country Link
JP (1) JPS5636219B2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6160635U (en:Method) * 1984-09-21 1986-04-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6160635U (en:Method) * 1984-09-21 1986-04-24

Also Published As

Publication number Publication date
JPS50116336A (en:Method) 1975-09-11

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