JPS563618B2 - - Google Patents
Info
- Publication number
- JPS563618B2 JPS563618B2 JP6675374A JP6675374A JPS563618B2 JP S563618 B2 JPS563618 B2 JP S563618B2 JP 6675374 A JP6675374 A JP 6675374A JP 6675374 A JP6675374 A JP 6675374A JP S563618 B2 JPS563618 B2 JP S563618B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6675374A JPS563618B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6675374A JPS563618B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50159268A JPS50159268A (en:Method) | 1975-12-23 |
| JPS563618B2 true JPS563618B2 (en:Method) | 1981-01-26 |
Family
ID=13324946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6675374A Expired JPS563618B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS563618B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000306818A (ja) * | 1999-04-23 | 2000-11-02 | Nec Kansai Ltd | ストライプ状パターンの露光方法 |
| JP2007164085A (ja) * | 2005-11-15 | 2007-06-28 | Nsk Ltd | 近接露光方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4852479A (en:Method) * | 1971-11-05 | 1973-07-23 |
-
1974
- 1974-06-11 JP JP6675374A patent/JPS563618B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50159268A (en:Method) | 1975-12-23 |