JPS5636179U - - Google Patents
Info
- Publication number
- JPS5636179U JPS5636179U JP11741279U JP11741279U JPS5636179U JP S5636179 U JPS5636179 U JP S5636179U JP 11741279 U JP11741279 U JP 11741279U JP 11741279 U JP11741279 U JP 11741279U JP S5636179 U JPS5636179 U JP S5636179U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11741279U JPS5636179U (enExample) | 1979-08-28 | 1979-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11741279U JPS5636179U (enExample) | 1979-08-28 | 1979-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5636179U true JPS5636179U (enExample) | 1981-04-07 |
Family
ID=29349621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11741279U Pending JPS5636179U (enExample) | 1979-08-28 | 1979-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636179U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814839A (ja) * | 1981-07-20 | 1983-01-27 | Sumitomo Metal Mining Co Ltd | 投影露光装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720843U (enExample) * | 1971-03-18 | 1972-11-09 |
-
1979
- 1979-08-28 JP JP11741279U patent/JPS5636179U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720843U (enExample) * | 1971-03-18 | 1972-11-09 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814839A (ja) * | 1981-07-20 | 1983-01-27 | Sumitomo Metal Mining Co Ltd | 投影露光装置 |