JPS5636142Y2 - - Google Patents
Info
- Publication number
- JPS5636142Y2 JPS5636142Y2 JP10286379U JP10286379U JPS5636142Y2 JP S5636142 Y2 JPS5636142 Y2 JP S5636142Y2 JP 10286379 U JP10286379 U JP 10286379U JP 10286379 U JP10286379 U JP 10286379U JP S5636142 Y2 JPS5636142 Y2 JP S5636142Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286379U JPS5636142Y2 (en:Method) | 1979-07-25 | 1979-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286379U JPS5636142Y2 (en:Method) | 1979-07-25 | 1979-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5621451U JPS5621451U (en:Method) | 1981-02-25 |
| JPS5636142Y2 true JPS5636142Y2 (en:Method) | 1981-08-25 |
Family
ID=29335574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10286379U Expired JPS5636142Y2 (en:Method) | 1979-07-25 | 1979-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5636142Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7534049B2 (ja) * | 2021-01-20 | 2024-08-14 | 東京エレクトロン株式会社 | 保持部材、上部電極アセンブリ、及びプラズマ処理装置 |
-
1979
- 1979-07-25 JP JP10286379U patent/JPS5636142Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5621451U (en:Method) | 1981-02-25 |