JPS5635748B2 - - Google Patents

Info

Publication number
JPS5635748B2
JPS5635748B2 JP4721574A JP4721574A JPS5635748B2 JP S5635748 B2 JPS5635748 B2 JP S5635748B2 JP 4721574 A JP4721574 A JP 4721574A JP 4721574 A JP4721574 A JP 4721574A JP S5635748 B2 JPS5635748 B2 JP S5635748B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4721574A
Other languages
Japanese (ja)
Other versions
JPS50139083A (he
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4721574A priority Critical patent/JPS5635748B2/ja
Publication of JPS50139083A publication Critical patent/JPS50139083A/ja
Publication of JPS5635748B2 publication Critical patent/JPS5635748B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4721574A 1974-04-26 1974-04-26 Expired JPS5635748B2 (he)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4721574A JPS5635748B2 (he) 1974-04-26 1974-04-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4721574A JPS5635748B2 (he) 1974-04-26 1974-04-26

Publications (2)

Publication Number Publication Date
JPS50139083A JPS50139083A (he) 1975-11-06
JPS5635748B2 true JPS5635748B2 (he) 1981-08-19

Family

ID=12768925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4721574A Expired JPS5635748B2 (he) 1974-04-26 1974-04-26

Country Status (1)

Country Link
JP (1) JPS5635748B2 (he)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991009148A1 (en) * 1989-12-11 1991-06-27 Hitachi, Ltd. Device for vacuum treatment and device for and method of film formation using said device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617489Y2 (he) * 1977-03-22 1981-04-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991009148A1 (en) * 1989-12-11 1991-06-27 Hitachi, Ltd. Device for vacuum treatment and device for and method of film formation using said device

Also Published As

Publication number Publication date
JPS50139083A (he) 1975-11-06

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