JPS5635519B2 - - Google Patents
Info
- Publication number
- JPS5635519B2 JPS5635519B2 JP13631676A JP13631676A JPS5635519B2 JP S5635519 B2 JPS5635519 B2 JP S5635519B2 JP 13631676 A JP13631676 A JP 13631676A JP 13631676 A JP13631676 A JP 13631676A JP S5635519 B2 JPS5635519 B2 JP S5635519B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Discharge Of Articles From Conveyors (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13631676A JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5362364A JPS5362364A (en) | 1978-06-03 |
| JPS5635519B2 true JPS5635519B2 (OSRAM) | 1981-08-18 |
Family
ID=15172350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13631676A Granted JPS5362364A (en) | 1976-11-15 | 1976-11-15 | Apparatus for washing sheet-shaped article |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5362364A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56168072A (en) * | 1980-05-30 | 1981-12-24 | Hitachi Ltd | Steam drying method and apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5148173Y2 (OSRAM) * | 1971-05-12 | 1976-11-19 | ||
| JPS4914585A (OSRAM) * | 1972-05-20 | 1974-02-08 |
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1976
- 1976-11-15 JP JP13631676A patent/JPS5362364A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5362364A (en) | 1978-06-03 |