JPS5635025B2 - - Google Patents

Info

Publication number
JPS5635025B2
JPS5635025B2 JP8734371A JP8734371A JPS5635025B2 JP S5635025 B2 JPS5635025 B2 JP S5635025B2 JP 8734371 A JP8734371 A JP 8734371A JP 8734371 A JP8734371 A JP 8734371A JP S5635025 B2 JPS5635025 B2 JP S5635025B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8734371A
Other languages
Japanese (ja)
Other versions
JPS4852374A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8734371A priority Critical patent/JPS5635025B2/ja
Publication of JPS4852374A publication Critical patent/JPS4852374A/ja
Publication of JPS5635025B2 publication Critical patent/JPS5635025B2/ja
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/16Composite materials, e.g. fibre reinforced
    • B23K2103/166Multilayered materials
    • B23K2103/172Multilayered materials wherein at least one of the layers is non-metallic

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
JP8734371A 1971-11-02 1971-11-02 Expired JPS5635025B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8734371A JPS5635025B2 (de) 1971-11-02 1971-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8734371A JPS5635025B2 (de) 1971-11-02 1971-11-02

Publications (2)

Publication Number Publication Date
JPS4852374A JPS4852374A (de) 1973-07-23
JPS5635025B2 true JPS5635025B2 (de) 1981-08-14

Family

ID=13912208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8734371A Expired JPS5635025B2 (de) 1971-11-02 1971-11-02

Country Status (1)

Country Link
JP (1) JPS5635025B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016392A (ja) * 2001-10-01 2010-01-21 Xsil Technology Ltd 基板、特に半導体ウェハの加工

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53123657A (en) * 1977-04-04 1978-10-28 Nec Corp Production of semiconductor unit
JP4439990B2 (ja) * 2004-04-28 2010-03-24 株式会社ディスコ レーザー加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010016392A (ja) * 2001-10-01 2010-01-21 Xsil Technology Ltd 基板、特に半導体ウェハの加工

Also Published As

Publication number Publication date
JPS4852374A (de) 1973-07-23

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