JPS5634560Y2 - - Google Patents

Info

Publication number
JPS5634560Y2
JPS5634560Y2 JP1976131273U JP13127376U JPS5634560Y2 JP S5634560 Y2 JPS5634560 Y2 JP S5634560Y2 JP 1976131273 U JP1976131273 U JP 1976131273U JP 13127376 U JP13127376 U JP 13127376U JP S5634560 Y2 JPS5634560 Y2 JP S5634560Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976131273U
Other languages
Japanese (ja)
Other versions
JPS5350429U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976131273U priority Critical patent/JPS5634560Y2/ja
Publication of JPS5350429U publication Critical patent/JPS5350429U/ja
Application granted granted Critical
Publication of JPS5634560Y2 publication Critical patent/JPS5634560Y2/ja
Expired legal-status Critical Current

Links

JP1976131273U 1976-10-01 1976-10-01 Expired JPS5634560Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976131273U JPS5634560Y2 (cg-RX-API-DMAC7.html) 1976-10-01 1976-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976131273U JPS5634560Y2 (cg-RX-API-DMAC7.html) 1976-10-01 1976-10-01

Publications (2)

Publication Number Publication Date
JPS5350429U JPS5350429U (cg-RX-API-DMAC7.html) 1978-04-28
JPS5634560Y2 true JPS5634560Y2 (cg-RX-API-DMAC7.html) 1981-08-14

Family

ID=28740370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976131273U Expired JPS5634560Y2 (cg-RX-API-DMAC7.html) 1976-10-01 1976-10-01

Country Status (1)

Country Link
JP (1) JPS5634560Y2 (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131269A (en) * 1975-05-12 1976-11-15 Toshiba Corp Vapor phase propagation process and vapor phase propagation unit

Also Published As

Publication number Publication date
JPS5350429U (cg-RX-API-DMAC7.html) 1978-04-28

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