JPS5634522B2 - - Google Patents
Info
- Publication number
- JPS5634522B2 JPS5634522B2 JP12133876A JP12133876A JPS5634522B2 JP S5634522 B2 JPS5634522 B2 JP S5634522B2 JP 12133876 A JP12133876 A JP 12133876A JP 12133876 A JP12133876 A JP 12133876A JP S5634522 B2 JPS5634522 B2 JP S5634522B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12133876A JPS5347683A (en) | 1976-10-12 | 1976-10-12 | Cargo forwarding and receiving system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12133876A JPS5347683A (en) | 1976-10-12 | 1976-10-12 | Cargo forwarding and receiving system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5347683A JPS5347683A (en) | 1978-04-28 |
| JPS5634522B2 true JPS5634522B2 (cs) | 1981-08-11 |
Family
ID=14808773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12133876A Granted JPS5347683A (en) | 1976-10-12 | 1976-10-12 | Cargo forwarding and receiving system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5347683A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190013733A (ko) | 2017-06-30 | 2019-02-11 | 가부시키가이샤 아루박 | 성막 장치, 마스크 프레임, 얼라인먼트 방법 |
| KR20190101440A (ko) | 2017-10-05 | 2019-08-30 | 가부시키가이샤 아루박 | 스퍼터링 장치 |
-
1976
- 1976-10-12 JP JP12133876A patent/JPS5347683A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190013733A (ko) | 2017-06-30 | 2019-02-11 | 가부시키가이샤 아루박 | 성막 장치, 마스크 프레임, 얼라인먼트 방법 |
| KR20190101440A (ko) | 2017-10-05 | 2019-08-30 | 가부시키가이샤 아루박 | 스퍼터링 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5347683A (en) | 1978-04-28 |