JPS5633766B2 - - Google Patents

Info

Publication number
JPS5633766B2
JPS5633766B2 JP13979174A JP13979174A JPS5633766B2 JP S5633766 B2 JPS5633766 B2 JP S5633766B2 JP 13979174 A JP13979174 A JP 13979174A JP 13979174 A JP13979174 A JP 13979174A JP S5633766 B2 JPS5633766 B2 JP S5633766B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13979174A
Other languages
Japanese (ja)
Other versions
JPS5165923A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13979174A priority Critical patent/JPS5165923A/en
Priority to US05/637,478 priority patent/US4034414A/en
Publication of JPS5165923A publication Critical patent/JPS5165923A/en
Publication of JPS5633766B2 publication Critical patent/JPS5633766B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
JP13979174A 1974-12-04 1974-12-04 JIKI HETSUDO Granted JPS5165923A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13979174A JPS5165923A (en) 1974-12-04 1974-12-04 JIKI HETSUDO
US05/637,478 US4034414A (en) 1974-12-04 1975-12-03 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13979174A JPS5165923A (en) 1974-12-04 1974-12-04 JIKI HETSUDO

Publications (2)

Publication Number Publication Date
JPS5165923A JPS5165923A (en) 1976-06-08
JPS5633766B2 true JPS5633766B2 (en) 1981-08-06

Family

ID=15253499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13979174A Granted JPS5165923A (en) 1974-12-04 1974-12-04 JIKI HETSUDO

Country Status (1)

Country Link
JP (1) JPS5165923A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000501B1 (en) * 2018-03-14 2019-07-16 토토 가부시키가이샤 Electrostatic chuck

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871214A (en) * 1971-12-20 1973-09-27
JPS4877818A (en) * 1971-12-27 1973-10-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871214A (en) * 1971-12-20 1973-09-27
JPS4877818A (en) * 1971-12-27 1973-10-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102000501B1 (en) * 2018-03-14 2019-07-16 토토 가부시키가이샤 Electrostatic chuck

Also Published As

Publication number Publication date
JPS5165923A (en) 1976-06-08

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