JPS5633766B2 - - Google Patents
Info
- Publication number
- JPS5633766B2 JPS5633766B2 JP13979174A JP13979174A JPS5633766B2 JP S5633766 B2 JPS5633766 B2 JP S5633766B2 JP 13979174 A JP13979174 A JP 13979174A JP 13979174 A JP13979174 A JP 13979174A JP S5633766 B2 JPS5633766 B2 JP S5633766B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Magnetic Heads (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13979174A JPS5165923A (en) | 1974-12-04 | 1974-12-04 | JIKI HETSUDO |
US05/637,478 US4034414A (en) | 1974-12-04 | 1975-12-03 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13979174A JPS5165923A (en) | 1974-12-04 | 1974-12-04 | JIKI HETSUDO |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5165923A JPS5165923A (en) | 1976-06-08 |
JPS5633766B2 true JPS5633766B2 (en) | 1981-08-06 |
Family
ID=15253499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13979174A Granted JPS5165923A (en) | 1974-12-04 | 1974-12-04 | JIKI HETSUDO |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5165923A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102000501B1 (en) * | 2018-03-14 | 2019-07-16 | 토토 가부시키가이샤 | Electrostatic chuck |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4871214A (en) * | 1971-12-20 | 1973-09-27 | ||
JPS4877818A (en) * | 1971-12-27 | 1973-10-19 |
-
1974
- 1974-12-04 JP JP13979174A patent/JPS5165923A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4871214A (en) * | 1971-12-20 | 1973-09-27 | ||
JPS4877818A (en) * | 1971-12-27 | 1973-10-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102000501B1 (en) * | 2018-03-14 | 2019-07-16 | 토토 가부시키가이샤 | Electrostatic chuck |
Also Published As
Publication number | Publication date |
---|---|
JPS5165923A (en) | 1976-06-08 |