JPS5633654Y2 - - Google Patents

Info

Publication number
JPS5633654Y2
JPS5633654Y2 JP12963572U JP12963572U JPS5633654Y2 JP S5633654 Y2 JPS5633654 Y2 JP S5633654Y2 JP 12963572 U JP12963572 U JP 12963572U JP 12963572 U JP12963572 U JP 12963572U JP S5633654 Y2 JPS5633654 Y2 JP S5633654Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12963572U
Other languages
Japanese (ja)
Other versions
JPS49111482U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12963572U priority Critical patent/JPS5633654Y2/ja
Publication of JPS49111482U publication Critical patent/JPS49111482U/ja
Application granted granted Critical
Publication of JPS5633654Y2 publication Critical patent/JPS5633654Y2/ja
Expired legal-status Critical Current

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  • Coating Apparatus (AREA)
JP12963572U 1972-11-09 1972-11-09 Expired JPS5633654Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12963572U JPS5633654Y2 (enrdf_load_stackoverflow) 1972-11-09 1972-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12963572U JPS5633654Y2 (enrdf_load_stackoverflow) 1972-11-09 1972-11-09

Publications (2)

Publication Number Publication Date
JPS49111482U JPS49111482U (enrdf_load_stackoverflow) 1974-09-24
JPS5633654Y2 true JPS5633654Y2 (enrdf_load_stackoverflow) 1981-08-10

Family

ID=28387681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12963572U Expired JPS5633654Y2 (enrdf_load_stackoverflow) 1972-11-09 1972-11-09

Country Status (1)

Country Link
JP (1) JPS5633654Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120331A (ja) * 1984-07-09 1986-01-29 Nec Corp レジストベ−ク装置
JP2649156B2 (ja) * 1987-02-13 1997-09-03 東京エレクトロン 株式会社 レジスト塗布装置と方法
JP2800008B2 (ja) * 1988-06-27 1998-09-21 東京エレクトロン 株式会社 回転処理装置及び回転処理方法

Also Published As

Publication number Publication date
JPS49111482U (enrdf_load_stackoverflow) 1974-09-24

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