JPS5633566Y2 - - Google Patents

Info

Publication number
JPS5633566Y2
JPS5633566Y2 JP1977109143U JP10914377U JPS5633566Y2 JP S5633566 Y2 JPS5633566 Y2 JP S5633566Y2 JP 1977109143 U JP1977109143 U JP 1977109143U JP 10914377 U JP10914377 U JP 10914377U JP S5633566 Y2 JPS5633566 Y2 JP S5633566Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977109143U
Other languages
Japanese (ja)
Other versions
JPS5437256U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977109143U priority Critical patent/JPS5633566Y2/ja
Publication of JPS5437256U publication Critical patent/JPS5437256U/ja
Application granted granted Critical
Publication of JPS5633566Y2 publication Critical patent/JPS5633566Y2/ja
Expired legal-status Critical Current

Links

JP1977109143U 1977-08-17 1977-08-17 Expired JPS5633566Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977109143U JPS5633566Y2 (OSRAM) 1977-08-17 1977-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977109143U JPS5633566Y2 (OSRAM) 1977-08-17 1977-08-17

Publications (2)

Publication Number Publication Date
JPS5437256U JPS5437256U (OSRAM) 1979-03-10
JPS5633566Y2 true JPS5633566Y2 (OSRAM) 1981-08-08

Family

ID=29054832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977109143U Expired JPS5633566Y2 (OSRAM) 1977-08-17 1977-08-17

Country Status (1)

Country Link
JP (1) JPS5633566Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961530U (ja) * 1982-10-15 1984-04-23 株式会社日立国際電気 半導体装置の熱処理炉の加熱装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5071056U (OSRAM) * 1973-10-27 1975-06-23
JPS5282459U (OSRAM) * 1975-12-17 1977-06-20

Also Published As

Publication number Publication date
JPS5437256U (OSRAM) 1979-03-10

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