JPS5633566Y2 - - Google Patents

Info

Publication number
JPS5633566Y2
JPS5633566Y2 JP1977109143U JP10914377U JPS5633566Y2 JP S5633566 Y2 JPS5633566 Y2 JP S5633566Y2 JP 1977109143 U JP1977109143 U JP 1977109143U JP 10914377 U JP10914377 U JP 10914377U JP S5633566 Y2 JPS5633566 Y2 JP S5633566Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977109143U
Other languages
Japanese (ja)
Other versions
JPS5437256U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977109143U priority Critical patent/JPS5633566Y2/ja
Publication of JPS5437256U publication Critical patent/JPS5437256U/ja
Application granted granted Critical
Publication of JPS5633566Y2 publication Critical patent/JPS5633566Y2/ja
Expired legal-status Critical Current

Links

JP1977109143U 1977-08-17 1977-08-17 Expired JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977109143U JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-17 1977-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977109143U JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-17 1977-08-17

Publications (2)

Publication Number Publication Date
JPS5437256U JPS5437256U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-10
JPS5633566Y2 true JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-08-08

Family

ID=29054832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977109143U Expired JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-08-17 1977-08-17

Country Status (1)

Country Link
JP (1) JPS5633566Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961530U (ja) * 1982-10-15 1984-04-23 株式会社日立国際電気 半導体装置の熱処理炉の加熱装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5071056U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-10-27 1975-06-23
JPS5282459U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-12-17 1977-06-20

Also Published As

Publication number Publication date
JPS5437256U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-10

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