JPS5633149Y2 - - Google Patents
Info
- Publication number
- JPS5633149Y2 JPS5633149Y2 JP16885776U JP16885776U JPS5633149Y2 JP S5633149 Y2 JPS5633149 Y2 JP S5633149Y2 JP 16885776 U JP16885776 U JP 16885776U JP 16885776 U JP16885776 U JP 16885776U JP S5633149 Y2 JPS5633149 Y2 JP S5633149Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16885776U JPS5633149Y2 (en:Method) | 1976-12-16 | 1976-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16885776U JPS5633149Y2 (en:Method) | 1976-12-16 | 1976-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5342575U JPS5342575U (en:Method) | 1978-04-12 |
| JPS5633149Y2 true JPS5633149Y2 (en:Method) | 1981-08-06 |
Family
ID=28776468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16885776U Expired JPS5633149Y2 (en:Method) | 1976-12-16 | 1976-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633149Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5860552A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
-
1976
- 1976-12-16 JP JP16885776U patent/JPS5633149Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5342575U (en:Method) | 1978-04-12 |