JPS5633149Y2 - - Google Patents

Info

Publication number
JPS5633149Y2
JPS5633149Y2 JP1976168857U JP16885776U JPS5633149Y2 JP S5633149 Y2 JPS5633149 Y2 JP S5633149Y2 JP 1976168857 U JP1976168857 U JP 1976168857U JP 16885776 U JP16885776 U JP 16885776U JP S5633149 Y2 JPS5633149 Y2 JP S5633149Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976168857U
Other languages
Japanese (ja)
Other versions
JPS5342575U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976168857U priority Critical patent/JPS5633149Y2/ja
Publication of JPS5342575U publication Critical patent/JPS5342575U/ja
Application granted granted Critical
Publication of JPS5633149Y2 publication Critical patent/JPS5633149Y2/ja
Expired legal-status Critical Current

Links

JP1976168857U 1976-12-16 1976-12-16 Expired JPS5633149Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976168857U JPS5633149Y2 (cg-RX-API-DMAC7.html) 1976-12-16 1976-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976168857U JPS5633149Y2 (cg-RX-API-DMAC7.html) 1976-12-16 1976-12-16

Publications (2)

Publication Number Publication Date
JPS5342575U JPS5342575U (cg-RX-API-DMAC7.html) 1978-04-12
JPS5633149Y2 true JPS5633149Y2 (cg-RX-API-DMAC7.html) 1981-08-06

Family

ID=28776468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976168857U Expired JPS5633149Y2 (cg-RX-API-DMAC7.html) 1976-12-16 1976-12-16

Country Status (1)

Country Link
JP (1) JPS5633149Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置

Also Published As

Publication number Publication date
JPS5342575U (cg-RX-API-DMAC7.html) 1978-04-12

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