JPS5632575B2 - - Google Patents
Info
- Publication number
- JPS5632575B2 JPS5632575B2 JP3128476A JP3128476A JPS5632575B2 JP S5632575 B2 JPS5632575 B2 JP S5632575B2 JP 3128476 A JP3128476 A JP 3128476A JP 3128476 A JP3128476 A JP 3128476A JP S5632575 B2 JPS5632575 B2 JP S5632575B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3128476A JPS52115261A (en) | 1976-03-24 | 1976-03-24 | Fine particle monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3128476A JPS52115261A (en) | 1976-03-24 | 1976-03-24 | Fine particle monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52115261A JPS52115261A (en) | 1977-09-27 |
| JPS5632575B2 true JPS5632575B2 (en:Method) | 1981-07-29 |
Family
ID=12327005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3128476A Granted JPS52115261A (en) | 1976-03-24 | 1976-03-24 | Fine particle monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52115261A (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2019239588A1 (ja) * | 2018-06-15 | 2021-06-24 | 日本碍子株式会社 | 微粒子数検出器 |
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1976
- 1976-03-24 JP JP3128476A patent/JPS52115261A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52115261A (en) | 1977-09-27 |