JPS5631890B2 - - Google Patents

Info

Publication number
JPS5631890B2
JPS5631890B2 JP13798377A JP13798377A JPS5631890B2 JP S5631890 B2 JPS5631890 B2 JP S5631890B2 JP 13798377 A JP13798377 A JP 13798377A JP 13798377 A JP13798377 A JP 13798377A JP S5631890 B2 JPS5631890 B2 JP S5631890B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13798377A
Other versions
JPS5471578A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13798377A priority Critical patent/JPS5471578A/ja
Publication of JPS5471578A publication Critical patent/JPS5471578A/ja
Publication of JPS5631890B2 publication Critical patent/JPS5631890B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Physical Vapour Deposition (AREA)
JP13798377A 1977-11-18 1977-11-18 Working method of metal films Granted JPS5471578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13798377A JPS5471578A (en) 1977-11-18 1977-11-18 Working method of metal films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13798377A JPS5471578A (en) 1977-11-18 1977-11-18 Working method of metal films

Publications (2)

Publication Number Publication Date
JPS5471578A JPS5471578A (en) 1979-06-08
JPS5631890B2 true JPS5631890B2 (ja) 1981-07-24

Family

ID=15211304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13798377A Granted JPS5471578A (en) 1977-11-18 1977-11-18 Working method of metal films

Country Status (1)

Country Link
JP (1) JPS5471578A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276519A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 金属パタ−ンの食刻方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110773A (en) * 1974-07-16 1976-01-28 Nippon Electric Co Mos gatahandotaikairo
JPS51107773A (ja) * 1975-03-19 1976-09-24 Hitachi Ltd Handotaishoriho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110773A (en) * 1974-07-16 1976-01-28 Nippon Electric Co Mos gatahandotaikairo
JPS51107773A (ja) * 1975-03-19 1976-09-24 Hitachi Ltd Handotaishoriho

Also Published As

Publication number Publication date
JPS5471578A (en) 1979-06-08

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