JPS5631524B2 - - Google Patents
Info
- Publication number
- JPS5631524B2 JPS5631524B2 JP14129876A JP14129876A JPS5631524B2 JP S5631524 B2 JPS5631524 B2 JP S5631524B2 JP 14129876 A JP14129876 A JP 14129876A JP 14129876 A JP14129876 A JP 14129876A JP S5631524 B2 JPS5631524 B2 JP S5631524B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14129876A JPS5366255A (en) | 1976-11-26 | 1976-11-26 | Minute dimension measuring method and its apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14129876A JPS5366255A (en) | 1976-11-26 | 1976-11-26 | Minute dimension measuring method and its apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5366255A JPS5366255A (en) | 1978-06-13 |
| JPS5631524B2 true JPS5631524B2 (et) | 1981-07-22 |
Family
ID=15288622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14129876A Granted JPS5366255A (en) | 1976-11-26 | 1976-11-26 | Minute dimension measuring method and its apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5366255A (et) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2633718B2 (ja) * | 1990-10-03 | 1997-07-23 | 株式会社東芝 | 形状認識装置 |
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1976
- 1976-11-26 JP JP14129876A patent/JPS5366255A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5366255A (en) | 1978-06-13 |