JPS5631227B2 - - Google Patents

Info

Publication number
JPS5631227B2
JPS5631227B2 JP15561875A JP15561875A JPS5631227B2 JP S5631227 B2 JPS5631227 B2 JP S5631227B2 JP 15561875 A JP15561875 A JP 15561875A JP 15561875 A JP15561875 A JP 15561875A JP S5631227 B2 JPS5631227 B2 JP S5631227B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15561875A
Other languages
Japanese (ja)
Other versions
JPS5279396A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15561875A priority Critical patent/JPS5279396A/ja
Publication of JPS5279396A publication Critical patent/JPS5279396A/ja
Publication of JPS5631227B2 publication Critical patent/JPS5631227B2/ja
Granted legal-status Critical Current

Links

JP15561875A 1975-12-25 1975-12-25 Surface polishing device of thin film sheet Granted JPS5279396A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15561875A JPS5279396A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15561875A JPS5279396A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Publications (2)

Publication Number Publication Date
JPS5279396A JPS5279396A (en) 1977-07-04
JPS5631227B2 true JPS5631227B2 (OSRAM) 1981-07-20

Family

ID=15609936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15561875A Granted JPS5279396A (en) 1975-12-25 1975-12-25 Surface polishing device of thin film sheet

Country Status (1)

Country Link
JP (1) JPS5279396A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203831A (ja) * 1988-02-09 1989-08-16 Shimizu Corp 排熱回収システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203831A (ja) * 1988-02-09 1989-08-16 Shimizu Corp 排熱回収システム

Also Published As

Publication number Publication date
JPS5279396A (en) 1977-07-04

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